Patent · US Expired

Apparatus for determining the concentration of a gas in a vacuum chamber

US5283435A · kind A · utility

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3References

3Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Christoph Daube · Alzenau, DE
Alfred Belz · Niederrodenbach, DE
Uwe Kopacz · Großkrotzenburg, DE

Key dates

Filing date	May 12, 1992
Grant date	Feb 1, 1994
Priority date	—
Expiry date	May 12, 2012

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/0036
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An apparatus for determining the concentration of a gas in a vacuum chamber is described. Internal to the vacuum chamber are one or more cathodes. The chamber is fed via a gas inlet and is connected to a separate measurement chamber for accommodating a measuring device via a connecting line between the two chambers. The connecting line in conjunction with a pumping means produces a pressure gradient between the interior of the vacuum chamber and the interior of the measurement chamber. One end of the connecting line, located within the vacuum chamber terminates directly in the central region of a cathode surfaces facing the interior of the chamber, and the length, as well as the cross section of the connecting line being dimensioned so that the pressure gradient between the interior of the vacuum chamber and the interior of the measurement chamber, is precisely that required for measurement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.