Surface profiling using scanning force microscopy
US5283442A · kind A · utility
48Cited by
3References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 3, 1993 |
| Grant date | Feb 1, 1994 |
| Priority date | — |
| Expiry date | May 3, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/875
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for profiling surfaces, such as sidewalls of a trench or line, using a scanning force microscope provides improved measurement accuracy by controlling the position of the tip responsive to the real-time measured local slope of the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.