Optical table active leveling and vibration cancellation system
US5285995A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 14, 1992 |
| Grant date | Feb 15, 1994 |
| Priority date | — |
| Expiry date | May 14, 2012 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB60G2204/112
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An optical table active leveling and vibration cancellation system is disclosed. The system includes an optical table with three active isolation devices connected to the optical table, and one sole pneumatic device, such that the table is supported on all four corners. Each of the isolation devices includes a pneumatic suspension device and an electromagnetic suspension device. The pneumatic suspension device includes a pressurized load chamber, a gimballed piston received in the pressurized load chamber and coupled to the walls of the pressurized load chamber by a thin walled diaphragm, and a support rod extending from the optical table to the floor level. The electromagnetic bearing suspension device includes a magnetic bearing rotor having two planar surfaces and a peripheral surface, and two magnetic bearing stators, the stators each defining a central aperture and each stator being in a spaced apart relationship from each of the rotor planar surfaces. The rotor is secured to the support rod. Each of the stators includes an annular coil of wire. The electromagnetic suspension system may also include four radial electromagnets spaced around the peripheral surface of the rotor. …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.