Patent · US Expired

Apparatus for coating a substrate, especially with electrically nonconductive coatings

US5286360A · kind A · utility

68Cited by

5References

3Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Joachim Szczyrbowski · Goldbach, DE
Goetz Teschner · Gelnhausen, DE
Siegfried Beisswenger · Alzenau, DE

Key dates

Filing date	Jul 7, 1992
Grant date	Feb 15, 1994
Priority date	—
Expiry date	Jul 7, 2012

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/0206
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

In a method and an apparatus for coating a substrate (26) with electrically nonconductive coatings from an electrically conductive target (25) in a reactive (e.g., oxidizing) atmosphere, with a cathode (17) disposed in an evacuable coating chamber (16) and electrically cooperating with the target (25), the cathode (17), for the purpose of suppressing arcs, is connected to a DC power source and can be brought to a positive potential for brief time periods by means of an additional circuit (22, and 3 to 15, respectively), the frequency of this periodical polarity reversal being adjustable, depending on the coating to be deposited

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.