Charged particle energy analyzers
US5286974A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 16, 1992 |
| Grant date | Feb 15, 1994 |
| Priority date | — |
| Expiry date | Oct 16, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/285
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle energy analyser has a magnetic lens such as a snorkel-type lens and a source for directing ionising radiation onto a specimen causing charged particles to be emitted from its surface. The specimen is immersed in the magnetic imaging field of the magnetic lens so that particles having energies in a predetermined energy range are brought to a focus, the energies of the focussed particles being analysed by an energy analyser. An electrode arrangement is provided for enabling the magnetic imaging field of the magnetic lens to utilise unfocussed particles to cause charge neutralisation of the specimen. Alternatively, charged particles from a source are subjected to an electric field which is transverse to the optical axis of the magnetic lens and are guided onto the specimen by the magnetic imaging field of the magnetic lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.