High sensitivity-wide dynamic range optical tilt sensor
US5287165A · kind A · utility
19Cited by
3References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 1991 |
| Grant date | Feb 15, 1994 |
| Priority date | — |
| Expiry date | Sep 30, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A new and improved adaptive optics wavefront tilt sensor having both very high sensitivity and wide dynamic range is presented. In accordance with this invention, distortion is induced in each subaperture beam by passing a high f-number beam through a field lens having large amounts of spherical aberration. The distortion provides transition from a wide dynamic range, low sensitivity wavefront tilt measurement to a narrow dynamic range, high sensitivity wavefront tilt measurement. This beam is then impinged on a single photodector which provides at least one electrical signal indicative of centroid position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.