Installation and process for the distribution of very high purity nitrogen
US5287873A · kind A · utility
3Cited by
2References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 13, 1992 |
| Grant date | Feb 22, 1994 |
| Priority date | — |
| Expiry date | Nov 13, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8593
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The conduits (1-4) of length L have a linear section S.sub.1 and contain a volumetric flow rate of nitrogen Q such that, to obtain a molar concentration of impurities upon out-gassing less than C.sub.max, Q/S.sub.1 is not less than 9.5.times.10.sup.-9 L/C.sub.max. The conduits are of stainless steel with a low carbon content, not electropolished and/or chemically treated. The joints (6, 7, 9, 11) between the conduits and/or the active members (5) are maintained externally in a neutral protective atmosphere confined in a sealed casing (8, 9 . . . ) Application particularly to electronic industries.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.