Apparatus for controlling a material flow emitted by a heated evaporation source and application to a vacuum evaporation coating machine
US5288328A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Feb 2, 1993 |
| Grant date | Feb 22, 1994 |
| Priority date | — |
| Expiry date | Feb 2, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/548
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Source evaporation machine for covering samples optionally by a mixture produced by several sources (3). Mobile covers (6) are placed between the sources (3) and the sample. The covers (6) are designed so as to ensure that the solid parts (23,24) and the openings (21,25) alternate and the sources (3) move relative to the covers in such a way that different circumferences of the covers pass in front of them. As the angular sectors surrounded by the openings differ for each circumference, the degree of hiding of the sources (3) can be regulated in a very accurate and reliable manner. It is possible to modify the flow of the source on the sample or, in the case of several sources, vary the composition of the deposited mixture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.