Electron microscope
US5289005A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 1992 |
| Grant date | Feb 22, 1994 |
| Priority date | — |
| Expiry date | May 29, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24415
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscope capable of performing accurate X-ray analysis. A specimen stage on which a specimen to be investigated is placed, is disposed between the upper and lower magnetic pole pieces of the objective lens. The specimen is irradiated with the electron beam to detect X-rays emitted from the specimen. The specimen stage consists of a light element, such as beryllium, that produces a very small amount of X-rays when irradiated with the electron beam. A metal film of a heavy element, such as gold, is deposited on the upper surface of the specimen stage. This metal film produces a large amount of X-rays when irradiated with the electron beam. The X-rays emitted from the lower magnetic pole piece are absorbed by the metal film. Consequently, the X-ray detector of the microscope detects only the X-rays produced from the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.