Fluid treatment apparatus and method
US5289639A · kind A · utility
38Cited by
9References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 10, 1992 |
| Grant date | Mar 1, 1994 |
| Priority date | — |
| Expiry date | Jul 10, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/227
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.