Silane compositions and process
US5290342A · kind A · utility
10Cited by
23References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 24, 1992 |
| Grant date | Mar 1, 1994 |
| Priority date | — |
| Expiry date | Apr 24, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S95/901
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Improved process for separating ethylsilane from silane by selective adsorption onto an effectively treated carbon bed and method of treatment of such carbon bed to enhance the selective adsorption of ethylsilane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.