Apparatus with axial gas distribution for vacuum coating substrates on a carousel
US5290417A · kind A · utility
0Cited by
4References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 2, 1992 |
| Grant date | Mar 1, 1994 |
| Priority date | — |
| Expiry date | Apr 2, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/568
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A coating machine (1) has a carousel (5) with location seats (18, 19) for substrates (3) that are to be coated. Process chambers (8) are located in a circle coaxially to the carousel (5) outside of the carousel (5). All substrates (3) located in the process chambers (8) can be removed at the same time from the process chambers (8) and put down on the carousel (5) by means of substrate transfer devices (9). After turning the carousel (5) slightly, new substrates (3) can be transported simultaneously into the process chambers (8).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.