Microelectronic superconducting crossover and coil

US5291035A · kind A · utility

Assignee

• The Regents of the University of California · US

Inventors

• Frederick C. Wellstood · Lanham, US
• John J. Kingston · Oakland, US
• John M. Clarke · Dunlap, US

Key dates

• Filing date: Mar 10, 1993
• Grant date: Mar 1, 1994
• Expiry date: Mar 10, 2013

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N60/0521

Abstract

A microelectronic component comprising a crossover is provided comprising a substrate, a first high T.sub.c superconductor thin film, a second insulating thin film comprising SrTiO.sub.3 ; and a third high T.sub.c superconducting film which has strips which crossover one or more areas of the first superconductor film. An in situ method for depositing all three films on a substrate is provided which does not require annealing steps and which can be opened to the atmosphere between depositions.