Method and arrangement for detecting edges and bores of a workpiece with an optical probe head

US5291270A · kind A · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Klaus-Peter Koch · Aalen, DE
• Ralf Peter · Haiger, DE

Key dates

• Filing date: Mar 23, 1992
• Grant date: Mar 1, 1994
• Expiry date: Mar 23, 2012

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/005
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention is directed to a method and arrangement for detecting edges and bores on a workpiece with an optical probe head. The optical probe head is guided with constant beam power over the workpiece surface for detecting the edges and bores. In addition to the distance signal of the probe head, the intensity of the radiation backscattered from the workpiece is determined and stored. With the intensity values simultaneously stored with the coordinates of the workpiece surface in the region of the edges and bores, the coordinates of the edges and bores are determined from abrupt changes of the trace of the intensity.