Heater autotone control apparatus and method
US5291514A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 15, 1991 |
| Grant date | Mar 1, 1994 |
| Priority date | — |
| Expiry date | Jul 15, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D23/22
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method and apparatus for automatically and dynamically tuning individual heater segments of a multi-zone furnace which allows simultaneous minimization of temperature gradients within the furnace and prevention of premature aging and failure of the segments by controlling the relative temperatures thereof and equalization of the contributions of the segments to the heating of the furnace. Furnace and heater temperatures are monitored and furnace temperatures are used to develop set point biases for automatic control of heater segment temperatures. Some segments are also controlled as a function of power applied to other segments. Temperatures sensed within the furnace are combined such as by averaging to effectively provide virtual sensors in locations where sensors cannot otherwise be practically provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.