Scanning force microscope with integrated optics and cantilever mount
US5291775A · kind A · utility
48Cited by
13References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 1992 |
| Grant date | Mar 8, 1994 |
| Priority date | — |
| Expiry date | Mar 4, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/87
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The scanning force microscope includes integrated optics for viewing the optical lever arm, probe and sample to be examined. The scanning force microscope includes an improved mount for the probe, which is magnetically secured to the body of the scanning force microscope, to improve ease of handling and mounting the probe assembly. In one preferred embodiment the scanning force microscope, also includes a base portion with a fluid cell for receiving a sample in a sealed gas or liquid environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.