Diaphragm-type sensor
US5291781A · kind A · utility
29Cited by
4References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 1993 |
| Grant date | Mar 8, 1994 |
| Priority date | — |
| Expiry date | May 10, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/6845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A diaphragm-type sensor is disclosed which comprises a substrate including a cavity, a diaphragm formed on the cavity and supported by the substrate, a heater element arranged on the diaphragm, two sensor elements arranged on both sides of the heater means and slits between the heater means and the respective sensor means. The slits are effective in completely preventing the deformation of the diaphragm due to a heat propagated from the heater element, from influencing the sensor elements, whereby the diaphragm-type sensor exhibits stable output characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.