Top emitting VCSEL with etch stop layer
US5293392A · kind A · utility
83Cited by
4References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 31, 1992 |
| Grant date | Mar 8, 1994 |
| Priority date | — |
| Expiry date | Jul 31, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/209
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A top emitting vertical cavity surface emitting laser with an etch stop layer positioned in the top mirror stack so the stack can be etched to form a trench surrounding a mesa with the emitting area on the mesa and the trench confining current flow and lasing to the mesa.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.