Patent · US Expired

Method of manufacturing a diamond heat sink

US5294381A · kind A · utility

35Cited by
6References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 29, 1992
Grant dateMar 15, 1994
Priority date
Expiry dateOct 29, 2012

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A polycrystalline diamond is prepared by chemical vapor deposition (step 101). A surface of the polycrystalline diamond is metallized (step 102). The metallized surface of the polycrystalline diamond is grooved with a YAG laser (step 103). A wedge or the like is driven into the grooves of the polycrystalline diamond to pressurize the same, whereby the polycrystalline diamond is divided along the grooves (step 104). Alternatively, a surface of a polycrystalline diamond prepared by chemical vapor deposition is grooved with a YAG laser (step 112), so that the surface of the polycrystalline diamond is metallized (step 113) after the grooving.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.