Cantilever displacement detection apparatus
US5294804A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 5, 1993 |
| Grant date | Mar 15, 1994 |
| Priority date | — |
| Expiry date | Mar 5, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/954
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever displacement detection apparatus comprises a laser diode for emitting a laser beam functioning as detection beam for displacement detection based on an optical lever method, and a position sensor having two light receiving regions for outputting signals corresponding to the intensity of received light. The laser diode and the position sensor are arranged such that the light beam is passed through an objective lens and made incident slantingly on a mirror provided on a free-end portion of a cantilever and the laser beam reflected by the mirror is passed through the objective lens and made incident on the position sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.