Method and apparatus for eliminating electric charges in a clean room
US5296018A · kind A · utility
23Cited by
9References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 18, 1992 |
| Grant date | Mar 22, 1994 |
| Priority date | — |
| Expiry date | Sep 18, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05F3/04
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method and apparatus for eliminating electric charges in a clean room is disclosed involving removing fine and superfine grains from air in the clean room, and generating ions in the thus purified air inside the room.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.