Patent · US Expired

Apparatus for the production of glow discharge

US5296784A · kind A · utility

5Cited by

5References

10Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Michael Geisler · Apolda, DE
Michael Jung · Frankfurt am Main, DE
Rudolf Koetter-Faulhaber · Karben, DE

Key dates

Filing date	Nov 22, 1991
Grant date	Mar 22, 1994
Priority date	—
Expiry date	Nov 22, 2011

Classification

Technology area (CPC H)Electricity
CPC primaryH05H7/18
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Apparatus for the production of glow discharge, preferably for a large-area plasma CVD process, including a vacuum coating chamber (K) and a microwave waveguide resonator with one or more coupling points, wherein the resonator is made in the form of a microwave waveguide ring resonator (13, 13'), reaction zones (R) are formed at the coupling points between the microwave waveguide ring resonator (13, 13') and the vacuum chamber (K), and in each case a series of magnets (5, 5', . . . ; 6, 6', . . . ) of different polarity are provided, so that in front of the reaction zone (R) individual tunnels of magnetic field lines (16, 16') running parallel thereto are formed and each magnetic field (16, 16') encloses a spatially uniform plasma tube (17) in the reaction zone (R).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.