Autoadjusting electron microscope
US5300776A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 16, 1992 |
| Grant date | Apr 5, 1994 |
| Priority date | — |
| Expiry date | Sep 16, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/216
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and an apparatus comprising a transmission electron microscope, an electron camera, a computer, and microscope control electronics. The electron camera captures an image produced by the electron microscope, the computer transforms the image into a digital diffractogram, and determines the microscope defocus and astigmatism by analyzing the diffractogram. The computer uses the determined astigmatism and defocus values to stigmate the microscope, and to set the defocus to a user-selected value. The computer also changes the direction of electron illumination to different values, and works out the true location of the optic axis of the microscope from the changes in the diffractograms recorded for the different illumination directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.