Arrangement for coupling in of microwave energy
US5300901A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 10, 1992 |
| Grant date | Apr 5, 1994 |
| Priority date | — |
| Expiry date | Jul 10, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P5/103
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
An arrangement for coupling microwave energy with a reaction chamber, including electrically stable tuning and being, within limits, tolerant against changes in critical dimensions and power fluctuations. A coaxial line between a hollow waveguide and the reaction chamber is of such a structure that it forms, at least together with the reaction chamber, a loss resonator for the microwave frequency employed. The coaxial line can comprise an absorber or, alternatively, can be made of a poorly conductive material. There is also the possibility of downgrading the quality of the resonator by leaving an annular gap between a metal plate and an outer conductor section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.