Patent · US Expired

Vacuum coating installation

US5302208A · kind A · utility

13Cited by

12References

20Claims

0Family size

Assignees

Leybold GmBH · DE
TOPPAN PRINTING CO., LTD. · JP

Inventors

Helmut Grimm · Mountainside, US
Thomas Krug · Worms, DE
Andreas Meier · Wilhermsdorf, DE
Klemens Ruebsam · Bad Orb, DE
Gerhard Steiniger · Ronneburg, DE
Mika Gamo · Kasukabe, JP
Mamoru Sekiguchi · Tokyo, JP
Mitsuru Kano · Osaki, JP
Hiroyuki Yasujima · Tokyo, JP
Takashi Miyamoto · Tokyo, JP
Noboru Sasaki · Yokohama, JP

Key dates

Filing date	Aug 3, 1992
Grant date	Apr 12, 1994
Priority date	—
Expiry date	Aug 3, 2012

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3053
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention relates to a vacuum coating installation comprising a container (9) in which is disposed the material (10) to be vaporized, for example SiO. The vaporization of the material (10) herein takes place by means of an electron beam gun (11) or by means of a vaporization oven. Opposing the surface of the material to be vaporized (10) is provided a synthetic film (5) to be coated which is transported further by means of a transport arrangement (4, 6, 22 to 27). Into the space between the material (10) to be vaporized and the material (5) to be coated a microwave is irradiated from an horn antenna (13).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.