Electrostatic positioner
US5303117A · kind A · utility
5Cited by
10References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 1993 |
| Grant date | Apr 12, 1994 |
| Priority date | — |
| Expiry date | Jun 9, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1024
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatic positioner with one or more first electrodes for producing forces to confine a charged specimen in the direction perpendicular to a center axis and second electrodes for producing forces to confine the charged specimen in the direction of the center axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.