Integrated resonant cavity acoustic transducer
US5303210A · kind A · utility
50Cited by
6References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 29, 1992 |
| Grant date | Apr 12, 1994 |
| Priority date | — |
| Expiry date | Oct 29, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K11/04
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
An integrated resonant cavity acoustic transducer includes a substrate chip having a cavity; a movable plate electrode; means for resiliently mounting the movable plate electrode across the cavity in the substrate chip; and a perforated electrode spaced from the movable plate electrode and mounted across the cavity in the substrate chip; the cavity has a depth from the movable electrode to the back wall of the cavity of approximately one quarter wavelength of the acoustic energy for enabling constructive interference between the primary and reflected acoustic wave for maximizing the displacement of said movable electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.