Ion-beam deposited multilayer waveguides and resonators
US5303319A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 28, 1992 |
| Grant date | Apr 12, 1994 |
| Priority date | — |
| Expiry date | Dec 28, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12178
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical waveguide is formed by depositing multiple layers of thin films using the process of ion beam sputter deposition. The waveguide is made up of alternating layers of a first material and a second material wherein the two materials have differing indices of refraction and low optical loss. These materials are deposited upon a thermally stable substrate creating a multilayer stack which functions as a waveguide. The multilayer waveguide has ultra low propagation losses and good mode discrimination, thus being very efficient for use in single mode applications. The waveguide is easily adaptable to batch processing which reduces costs and increases the performance of the waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.