Edge detector
US5304924A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 1992 |
| Grant date | Apr 19, 1994 |
| Priority date | — |
| Expiry date | Nov 20, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/852
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An edge detector is disclosed, which detector is improved by providing a probe moving relatively with a tested pattern, a device for detecting a working force or a tunnel current generated between the probe and the tested pattern, and a device for detecting an edge of the tested pattern according to the detected working force or tunnel current. An edge of the tested pattern is detected at high resolution by detecting the tunnel current flowing between a conductive tested pattern and a probe kept closely opposite thereto, or by detecting an atomic force or a magnetic force working between an insulated or a magnetic tested pattern and a lever.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.