Method for producing high quality thin layer films on substrates
US5306530A · kind A · utility
249Cited by
9References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 23, 1992 |
| Grant date | Apr 26, 1994 |
| Priority date | — |
| Expiry date | Nov 23, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/486
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.