Corrosion-resistant member for chemical apparatus using halogen series corrosive gas
US5306895A · kind A · utility
85Cited by
9References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 26, 1992 |
| Grant date | Apr 26, 1994 |
| Priority date | — |
| Expiry date | Mar 26, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6831
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An excellent corrosion resistant member of a ceramic heater for semiconductor production apparatuses to be exposed to a halogen series corrosive gas is provided. The corrosion resistant member uses one of an aluminum nitride and alumina sintered body as a substrate. A ceramic heater using the corrosion resistive member is also disclosed as well as a semiconductor heating device using the ceramic heater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.