Addition of oxygen to a gas mix for use in an excimer laser
US5307364A · kind A · utility
26Cited by
5References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 24, 1993 |
| Grant date | Apr 26, 1994 |
| Priority date | — |
| Expiry date | May 24, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to discovery that oxygen may be used to stabilize the efficiency and performance of an excimer laser. Therefore, oxygen is not a contaminant to be minimized but rather a necessary part of an excimer lasing composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.