Micro-valve and method of manufacturing
US5309943A · kind A · utility
43Cited by
13References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 7, 1992 |
| Grant date | May 10, 1994 |
| Priority date | — |
| Expiry date | Dec 7, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86895
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Described is a microvalve comprised of a movable spool and/or seat comprising a silicious spool having three planes, e.g. three planes aligned with all of the spool's planes, and a silicious seat conforming to the spool's planes. The spool and/or the seat may move to open or close the valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.