Measuring method for ellipsometric parameter and ellipsometer
US5311285A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 31, 1991 |
| Grant date | May 10, 1994 |
| Priority date | — |
| Expiry date | Dec 31, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Movable optical parts included in an ellipsometer are removed to increase the measurement speed, and a specific quadrant to which a phase difference .DELTA. as an ellipsometric parameter belongs is determined by one measuring operation. A beam is radiated from a light source section onto a measurement target, and the reflected beam having an elliptically polarized beam, which is reflected by the target, is divided into four different polarized light components. The optical intensities of the respective light components are then detected. Ellipsometric parameters .psi. and .DELTA. are calculated on the basis of the detected four optical intensities. In addition, the above-mentioned four different polarized light components are obtained by using a wave plate. Furthermore, the polarization directions of the four polarized light components whose optical intensities are obtained are respectively set at angles -45.degree., +45.degree., 90.degree., and 0.degree. with respect to a reference direction. Alternatively, a composite beam splitter is used to obtain four polarized light components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.