Method and apparatus to evaluate effectiveness of cleaning systems for high density electronics
US5312536A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 1992 |
| Grant date | May 17, 1994 |
| Priority date | — |
| Expiry date | Aug 25, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2805
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for a cleaning process control is disclosed. The apparatus includes two parallel plates of glass that have a plurality of shims positioned therebetween and a means for clamping these plates of glass firmly against the shims. A contaminant is positioned between the plates of glass and the apparatus is cleaned using a selected cleaning process. The apparatus can then be inspected to determine the effectiveness of a particular cleaning process by peering through the transparent glass plates to inspect for any remaining contaminant. The apparatus can then be cleaned more extensively and used again to check a different cleaning process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.