System for controlling the flow of gas into and out of a gas laser
US5315610A · kind A · utility
5Cited by
9References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 22, 1986 |
| Grant date | May 24, 1994 |
| Priority date | — |
| Expiry date | Sep 22, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/036
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A modularized system for controlling the gas pressure within a copper vapor or like laser is described herein. This system includes a gas input assembly which serves to direct gas into the laser in a controlled manner in response to the pressure therein for maintaining the laser pressure at a particular value, for example 40 torr. The system also includes a gas output assembly including a vacuum pump and a capillary tube arrangement which operates within both a viscous flow region and a molecular flow region for drawing gas out of the laser in a controlled manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.