Monolithic quartz resonator accelerometer
US5315874A · kind A · utility
13Cited by
3References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 1989 |
| Grant date | May 31, 1994 |
| Priority date | — |
| Expiry date | Feb 28, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monolithic quartz resonator accelerometer including a monolithic quartz sensing structure with a frame, a proof mass support structure within the frame, and a resonator structure interconnecting the frame and the support structure. Further included are a proof mass fixed to the support structure, and electrodes on the resonator structure for driving the resonator at a vibration frequency which varies as a function of the acceleration of the proof mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.