Wave front aberration measuring apparatus having means for adjusting position of collimator lens
US5317144A · kind A · utility
10Cited by
8References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 28, 1992 |
| Grant date | May 31, 1994 |
| Priority date | — |
| Expiry date | Jul 28, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B11/10576
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An apparatus for measuring a wave front aberration includes a light beam splitter for dividing a parallel laser light beam made incident from a measuring object into two beamfluxes, an image rotator disposed in at least one optical path of the divided beam fluxes for rotating the wave front on the optical axis, an interference device for interfering after superposing the beam fluxes whose wave fronts are rotated relatively, an imaging lens for forming the interfered beam into an image, and an observation device for observing the imaged interference fringes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.