Electron microscope equipped with x-ray analyzer
US5317154A · kind A · utility
6Cited by
3References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 5, 1993 |
| Grant date | May 31, 1994 |
| Priority date | — |
| Expiry date | Mar 5, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2442
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscope equipped with an x-ray detector whose position is made different, depending on whether the detector is in use or not. The microscope prevents the irradiated position and the image from escaping even when the detector is moved into or out of a valve. A switch is operated to move the detector. The microscope has a deflection current-correcting circuit which supplies correcting currents to the deflection coils in step with the operation of the switch.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.