Cold cathode ionization vacuum gauge with guard ring
US5317270A · kind A · utility
9Cited by
7References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 28, 1992 |
| Grant date | May 31, 1994 |
| Priority date | — |
| Expiry date | May 28, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vacuum guage of the ionisation type having a guage head comprising a substantially cylindrical cathode sleeve with an inlet at one end for communication with the vacuum with an anode positioned co-axially within the cathode sleeve; the head also has a guard ring interposed between the cathode sleeve and the anode and a vacuum feed through arrangement in which the anode and the guard ring are held substantially concentrically within the cathode sleeve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.