Deposited multi-layer device with a plastic substrate having an inorganic thin film layer
US5319479A · kind A · utility
27Cited by
10References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 30, 1991 |
| Grant date | Jun 7, 1994 |
| Priority date | — |
| Expiry date | Aug 30, 2011 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/0676
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A deposited multi-layer device of an electronic element and a plastic substrate on which an inorganic substance thin film layer is simultaneously formed on both surfaces of the substrate wherein each of the electronic element, plastic substrate and inorganic thin film have internal and thermal stress not equal to zero. The device is free from peeling, deformation or curl of the substrate and degradation due to impurities such as acid, alkali and water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.