Scanning force microscope
US5319960A · kind A · utility
42Cited by
8References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 6, 1992 |
| Grant date | Jun 14, 1994 |
| Priority date | — |
| Expiry date | Mar 6, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/87
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The scanning force microscope is an improved free standing type scanning force microscope with integrated scanning drivers for examination of a wide range of sizes and weights of stationary specimens, with the capability of scanning a sample in contact with a fluid. The scanning force microscope also includes motorized driver legs for operating the approach of the optical lever arm and sensor head to the sample, to allow for automation of the approach of the sensor head to the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.