Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same
US5321685A · kind A · utility
40Cited by
10References
4Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 20, 1992 |
| Grant date | Jun 14, 1994 |
| Priority date | — |
| Expiry date | Nov 20, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/947
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever type probe comprising a piezoelectric bimorph cantilever containing a piezoelectric material provided between driving electrodes for driving a cantilever, a probe formed thereon and a drawing electrode for a probe provided along the surface where a probe is formed, wherein there is provided a shielding electrode for electrically isolating the probe and the drawing electrode from the driving electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.