Micromechanical actuator

US5322258A · kind A · utility

Assignee

• Messerschmitt Bolkow Blohm GmbH · DE

Inventors

• Dieter Bosch · Munich, DE
• Helmut Seidel · Starnberg, DE
• Gunter Muck · Holzkirchen, DE

Key dates

• Filing date: Dec 11, 1990
• Grant date: Jun 21, 1994
• Expiry date: Dec 11, 2010

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F16K2099/0094
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A micromechanical actuator is suggested, the movable part of which, such as the diaphragm, the bending bar or a similar device, can be moved relative to a stationary part by a combination of electromagnetic and electrostatic forces. The manufacturing techniques and the applications of the actuator are described. The construction is very compact, that is, highly integrated.