Scanning probe microscope and method of observing sample by using such a microscope
US5323003A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 1992 |
| Grant date | Jun 21, 1994 |
| Priority date | — |
| Expiry date | Aug 28, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/851
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope is provided with a probe, a scanning device, a detecting device and an output device. The probe is disposed to face the surface of a sample. The scanning device two-dimensionally scans the surface of the sample using the probe. A signal corresponding to the structure of the sample is detected from the probe by the detecting device. From the signal detected in the detecting device, an observation image of the sample is output by the output device. The apparatus is further provided with a correcting device for correcting the scan by the scanning device so that the observation image output from the outputting device is not shifted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.