Patent · US Expired

Active matrix liquid crystal display having a peripheral driving circuit element

US5323042A · kind A · utility

327Cited by
2References
10Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 13, 1992
Grant dateJun 21, 1994
Priority date
Expiry dateNov 13, 2012

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/00
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

In the case of an LDD-structure thin film transistor, an on-current becomes large as impurity concentration of low level impurity source and drain regions is increased. Then, when the impurity concentration is increased to a first impurity concentration, the on-current reaches to a substantially maximum point. On the other hand, a cut-off current I.sub.off becomes substantially minimum when the impurity concentration is decreased to a second impurity concentration. The cut-off current is gradually increased even if the impurity concentration becomes higher or lower than the second impurity concentration. Therefore, impurity concentration of low level impurity source and drain regions of a thin film transistor for a peripheral circuit is set to a first impurity concentration, and that of low concentration impurity source and drain regions of a thin film transistor for a matrix circuit is set to a second impurity concentration.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.