Piezoelectric actuator for planar alignment

US5323082A · kind A · utility

Assignee

• Spectra Physics Lasers, Inc. · US

Inventor

• David L. Wright · Sacramento, US

Key dates

• Filing date: May 3, 1989
• Grant date: Jun 21, 1994
• Expiry date: May 3, 2009

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N30/2027

Abstract

An actuator for controlling alignment of an object that is characterized by an alignment plane, such as mirrors used in optical cavities, comprises a mounting frame, and a one piece alignment member formed of piezoelectric material having a first end and a second end that is secured to the mounting frame at the second end. On the first end, a first object contact, a second object contact, and a third object contact are secured defining an object plane. A means is provided for holding the object in contact with the first, second and third object contacts so that the alignment plane of the object has a predetermined relationship with the object plane defined by the object contacts on the tubular member. Electrodes are formed on the tubular member for establishing an electrical field between the surfaces of the alignment member so that the positions of the first object contact, second object contact and third object contact are controlled. By controlling the positions of the object contacts on the first end of the tubular member, precise tilting and translation of the alignment plane of the object is accomplished.