Bridge for connecting cores in a manufacturing equipment of polycrystal silicon
US5327454A · kind A · utility
9Cited by
16References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 27, 1992 |
| Grant date | Jul 5, 1994 |
| Priority date | — |
| Expiry date | Apr 27, 2012 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B13/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In a equipment for manufacturing polycrystal silicon by depositing it on filament cores electrically heated, by means of thermal decomposition of monosilane gas, a bridge for connecting said filament cores is constituted by tantalum, molybdenum, tungsten or zirconium. Preferably the sectional shape of the connection bridge may be of upturned triangle, tear droplet or rectangle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.