Production of barium titanate thin films
US5328718A · kind A · utility
13Cited by
10References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 1992 |
| Grant date | Jul 12, 1994 |
| Priority date | — |
| Expiry date | Oct 30, 2012 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A thin film of barium titanate is formed on a substrate by immersing the substrate in an aqueous solution containing barium ions and titanium alkoxide. The aqueous solution may contain not more than 20 vol % of one or more alkanolamines expressed by the general formula: EQU HO(C.sub.n H.sub.2n)mNH.sub.3-m where n is not more than 10, and m=1, 2 or 3.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.