Spectroscopic ellipsometry apparatus including an optical fiber
US5329357A · kind A · utility
121Cited by
8References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 21, 1993 |
| Grant date | Jul 12, 1994 |
| Priority date | — |
| Expiry date | Apr 21, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spectroscopic ellipsometer comprises a wideband light source, together with a first optical system including a rotating polarizer which applies a parallel beam to a sample contained in an enclosure. The reflected beam is picked up by an analyzer in a second optical system which transmits said reflected beam to a monochromator which is followed by a photodetector which is connected to control electronics connected, in turn, to a microcomputer. An optical fiber is provided between the source and the first optical system. Advantageously, a second optical fiber provided between the second optical system and the monochromator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.